Material Systems

• Multi-zones on various levels
• The first truly compliant resistor and substrate material system
• Thin substrates.   Flat or round or any geometry that can be CNC milled.
• Full density (monolithic structure)
• Fast temperature transition
• Internal RTD  covering the full heater area or multiple RTD’s focusing on specific locations.
• Robust proven reliability with millions of cycles proven in the field.
• Non-pressure AlN to AlN welding
• Heater design can be made in parallel circuit for low Voltage high power application.  Circuitry and ground plane shielding
• Internal  channels for cooling and vacuum

Properties of Aluminum Nitride Ceramic

Oasis heaters are made using AlN ceramic with internal Tungsten resistance traces.

Properties of Tungsten

The coefficient of thermal expansion of AlN and Tungsten is virtually identical.

 

Aluminum Nitride and Tungsten.
A marriage made in heating heaven.

• Unlike other ceramics (such as 99% or 96% Al2O3), AlN sinters to full density. Total porosity is < 1% and is not typically observable in SEM cross section.
• TMetallization layers are composed of tungsten metal, AlN, other oxide additives and also sinter to full density.
• Thin substrates.   Flat or round or any geometry that can be CNC milled.
• Full density (monolithic structure)
• Fast temperature transition
• Internal RTD  covering the full heater area or multiple RTD’s focusing on specific locations.
• Robust proven reliability with millions of cycles proven in the field.
• Non-pressure AlN to AlN welding
• Heater design can be made in parallel circuit for low Voltage high power application.  Circuitry and ground plane shielding
• Internal  channels for cooling and vacuum

• Tungsten metal with ceramic additives.
• Wide range of control of W resistivity based on additive package.
• Chemical bonding between W, ceramic additives and substrate.
• Metal/Ceramic interface with very low thermal resistance.
• Metallization peel mode = ceramic fracture.

• Aluminum nitride ceramic.
• Integrated internal tungsten based metallization.
• Metallization in planes, lines and vias.
• Fired in one process.
• Rigid structure: metal re-enforced ceramic