Oasis Materials

  • sales@oasismaterials.com
  • 858.486.8846
  • Capabilities
    • Diamond Machining of Ceramics or Glass to Tight Tolerance
    • Ceramic Processing
    • Thin Film Circuits
    • Micro Cooling Channels
    • Cold Isostatic Pressing to Near Net Shape
  • Products
    • High Performance Heaters
    • Stainless Steel and Glass Heaters
    • Wafer Heaters
    • Thermal Heads
    • Multi-layer Metallization and Ceramic Packages
  • Industries
    • Aerospace & Defense
    • Industrial, Electronics, Energy
    • Medical
    • Semiconductor
  • Materials
  • About Us
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    • About Oasis Precision
    • About Fralock
    • Careers
  • Contact
  • Visit Fralock

Material Systems

Aluminum Nitride Heater System Advantages

  • Multi-zones on various levels
  • The first truly compliant resistor and substrate material system
  • Thin substrates.   Flat or round or any geometry that can be CNC milled.
  • Full density (monolithic structure)
  • Fast temperature transition
  • Internal RTD  covering the full heater area or multiple RTD’s focusing on specific locations.
  • Robust proven reliability with millions of cycles proven in the field.
  • Non-pressure AlN to AlN welding
  • Heater design can be made in parallel circuit for low Voltage high power application.  Circuitry and ground plane shielding
  • Internal  channels for cooling and vacuum

Properties of Aluminum Nitride Ceramic

Oasis heaters are made using AlN ceramic with internal Tungsten resistance traces.

Properties of Tungsten

The coefficient of thermal expansion of AlN and Tungsten is virtually identical.

 

The System

Aluminum Nitride and Tungsten.
A marriage made in heating heaven.

  • Unlike other ceramics (such as 99% or 96% Al2O3), AlN sinters to full density. Total porosity is < 1% and is not typically observable in SEM cross section.
  • TMetallization layers are composed of tungsten metal, AlN, other oxide additives and also sinter to full density.
  • Thin substrates.   Flat or round or any geometry that can be CNC milled.
  • Full density (monolithic structure)
  • Fast temperature transition
  • Internal RTD  covering the full heater area or multiple RTD’s focusing on specific locations.
  • Robust proven reliability with millions of cycles proven in the field.
  • Non-pressure AlN to AlN welding
  • Heater design can be made in parallel circuit for low Voltage high power application.  Circuitry and ground plane shielding
  • Internal  channels for cooling and vacuum

Microstructure– Metal/Ceramic Interface

  • Tungsten metal with ceramic additives.
  • Wide range of control of W resistivity based on additive package.
  • Chemical bonding between W, ceramic additives and substrate.
  • Metal/Ceramic interface with very low thermal resistance.
  • Metallization peel mode = ceramic fracture.

Co-fired, Multilayer ALN

  • Aluminum nitride ceramic.
  • Integrated internal tungsten based metallization.
  • Metallization in planes, lines and vias.
  • Fired in one process.
  • Rigid structure: metal re-enforced ceramic

Industries Served

Semiconductor

Consumer Products

Medical

Defense

Aerospace

Contact Us

Oasis Materials

12131 Community Rd,
Poway, CA 92064
Get Directions

 


Oasis Precision

4130 Citrus Avenue, #17
Rocklin, CA 95677
Get Directions

  • Capabilities
  • Material Systems
  • ALN Heater Technology
  • Careers
  • Contact
  • Industries

© 2023, Oasis Materials. All rights reserved.

Oasis Materials
12131 Community Rd, Poway, CA 92064
Get Directions

858.486.8846
sales@oasismaterials.com

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