Wafer Heaters
- Wafer Heaters for Semiconductor Manufacturing
Fralock brings a unique capability to wafer heaters for the semiconductor manufacturing industry.
Using multi-layer technology, we can achieve multiple zones for high-temperature applications. Utilizing the unique capability to screen print resistance traces on multiple levels, we run the traces through the stem so the electrical connections are made in a lower temperature area of the assembly. Fralock utilizes Gatorizing, a process that increases the bulk resistivity of AlN at elevated temperatures, enhancing e-chuck capability and reducing cross-talk between heater and sensor circuitry.
