Oasis Materials

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Wafer Heaters

As a start-up in this area, Oasis brings a unique capability to this established product. Using multi-layer technology, Oasis can achieve multiple zones for high-temperature applications using its unique capability to screen print its resistance traces on multiple levels and run the traces through the stem so the electrical connections can be made in a much lower temperature area of the assembly. Oasis has also developed Gatorizing, a process to increase the bulk resistivity of AlN at elevated temperatures enhancing e-chuck capability and reducing cross-talk between heater and sensor circuitry.

380mm Multizone Heater

Wafer Heaters Image Gallery

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Other Oasis Products

High Performance Heaters

Thermal Heads

Substrates

Controllers

Brazed Assemblies

Contact Us

Oasis Materials

12131 Community Rd,
Poway, CA 92064
Get Directions

 


Oasis Precision

4130 Citrus Avenue, #17
Rocklin, CA 95677
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Oasis Materials
12131 Community Rd, Poway, CA 92064
Get Directions

858.486.8846
sales@oasismaterials.com

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